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“philip garrou”

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  • Handbook of 3D Integration, Volume 3

    3D Process Technology

    Edited by Mitsumasa Koyanagi, Philip Garrou, Peter Ramm ...
    Edited by key figures in 3D integration and written by top authors from high-tech companies and renowned research institutions, this book covers the intricate details of 3D process technology. As such, the main focus is on silicon via formation, bonding and debonding, thinning, via reveal and backside processing, both from a technological and a materials science perspective. The last part of the ... Read more

    $195.99 CAD