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Engineering (R0) eBook Series

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  • Advanced MEMS/NEMS Fabrication and Sensors

    Edited by Zhuoqing Yang ...
    Series series Engineering (R0)
    This book begins by introducing new and unique fabrication, micromachining, and integration manufacturing methods for MEMS (Micro-Electro-Mechanical Systems) and NEMS (Nano-Electro-Mechanical Systems) devices, as well as novel nanomaterials for sensor fabrications. The second section focuses on novel sensors based on these emerging MEMS/NEMS fabrication methods, and their related applications in ... Read more

    $192.99 CAD